Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers

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Authors
Lariviere, Stephane; Wilson, Chris; Kutrzeba Kotowska, Bogumila; Versluijs, Janko; Decoster, Stefan; Mao, Ming; van der Veen, Marleen; Jourdan, Nicolas; El-Mekki, Zaid; Heylen, Nancy; Kesters, Els; Verdonck, Patrick; Beral, Christophe; Van Den Heuvel, Dieter; De Bisschop, Peter; Bekaert, Joost; Blanco, Victor; Ciofi, Ivan; Wan, Danny; Briggs, Basoene; Mallik, Arindam; Hendrickx, Eric; Kim, Ryan Ryoung han; McIntyre, Greg; Ronse, Kurt; Boemmels, Juergen; Tokei, Zsolt; Mocuta, Dan
Conference
Extreme Ultraviolet (EUV) Lithography IX
Title
Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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