Defect learning methodology applied to microbump process at 20μm pitch and below

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Authors
Liebens, Maarten; Slabbekoorn, John; Miller, Andy; Beyne, Eric; Stoerring, M.; Hiebert, S.; Cross, A.
Conference
2018 29th Annual SemI Advanced Semiconductor Manufacturing Conference - ASMC
Title
Defect learning methodology applied to microbump process at 20μm pitch and below
Publication type
Proceedings paper
Embargo date
9999-12-31
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