Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge fin structures

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Authors

Loo, Roger; Arimura, Hiroaki; Cott, Daire; Witters, Liesbeth; Pourtois, Geoffrey; Schulze, Andreas; Douhard, Bastien; Vanherle, Wendy; Eneman, Geert; Richard, Olivier; Favia, Paola; Mitard, Jerome; Mocuta, Dan; Langer, Robert; Collaert, Nadine

DOI

10.1149/2.0191802jss

ISSN

2162-8769

Issue

2

Journal

ECS Journal of Solid State Science and Technology

Volume

7

Title

Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge fin structures

Publication type

Journal article

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