Epitaxial growth schemes for fin and Gate All Around devices

Thumbnail
Metadata
Show full item record
Authors
Loo, Roger; Hikavyy, Andriy; Rosseel, Erik; Porret, Clément; Vohra, Anurag; Kohen, David; Margetis, Joe; Tolle, John; Langer, Robert
Conference
11th International WorkShop on New Group IV Semiconductor Nanoelectronics
Title
Epitaxial growth schemes for fin and Gate All Around devices
Publication type
Meeting abstract
Collections