Ga-doped Ge and [B + Ga] Co-doped SiGe epitaxial source-drain for Sub-7 nm logic devices

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Authors
Porret, Clément; Margetis, Joe; Tolle, John; Sammak, Amir; Scappucci, Giordano; Petersen Barbosa Lima, Lucas; Kohen, David; Kunert, Bernardette; Hikavyy, Andriy; Loo, Roger
Conference
1st Joint ISTDM / ICSI 2018 Conference
Title
Ga-doped Ge and [B + Ga] Co-doped SiGe epitaxial source-drain for Sub-7 nm logic devices
Publication type
Meeting abstract
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