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The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements
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Authors
Witvrouw, Ann
;
Maex, Karen
;
De Ceuninck, Ward
;
Lekens, Geert
;
D'Haen, Jan
;
De Schepper, Luc
Issue
6_8
Journal
Microelectronics Reliability
Volume
38
Title
The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements
Publication type
Journal article
Embargo date
9999-12-31
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