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ESD diodes with Si/SiGe superlattice I/O finFET architecture in a vertically stacked horizontal nanowire technology
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Authors
Simicic, Marko
;
Hellings, Geert
;
Chen, Shih-Hung
;
Horiguchi, Naoto
;
Linten, Dimitri
Conference
48th European Solid-State Device Research Conference - ESSDERC
Title
ESD diodes with Si/SiGe superlattice I/O finFET architecture in a vertically stacked horizontal nanowire technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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