Authors

Stevens, Eric; Tomczak, Yoann; Chan, BT; Altamirano Sanchez, Efrain; Parsons, Gregory; Delabie, Annelies

ISSN

0897-4756

Issue

10

Journal

Chemistry of Materials

Volume

30

Title

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon ntride with inhibition on amorphous carbon

Publication type

Journal article