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Etch process modules development and integration in 3D-SOC applications
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Authors
Tutunjyan, Nina
;
Sardo, Stefano
;
De Vos, Joeri
;
Van Huylenbroeck, Stefaan
;
Jourdain, Anne
;
Peng, Lan
;
Inoue, Fumihiro
;
Rassoul, Nouredine
;
Beyer, Gerald
;
Beyne, Eric
;
Miller, Andy
;
Piumi, Daniele
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
196
Title
Etch process modules development and integration in 3D-SOC applications
Publication type
Journal article
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