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Impact of crystal orientation on ohmic contact resistance of enhancement-mode pGaN gate high electron mobility transistors on 200 mm Si substrates
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Authors
Van Hove, Marleen
;
Posthuma, Niels
;
Geens, Karen
;
Wellekens, Dirk
;
Li, Xiangdong
;
Decoutere, Stefaan
ISSN
0021-4922
Journal
Japanese Journal of Applied Physics
Volume
57
Title
Impact of crystal orientation on ohmic contact resistance of enhancement-mode pGaN gate high electron mobility transistors on 200 mm Si substrates
Publication type
Journal article
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