Authors

Beyne, Sofie; Croes, Kristof; Varela Pedreira, Olalla; Arnoldi, Laurent; van der Veen, Marleen; De Wolf, Ingrid; Tokei, Zsolt

Conference

2019 IEEE International Integrated Reliability Workshop (IIRW)

Title

Low-frequency noise measurements for electromigration characterization in BEOL interconnects

Publication type

Proceedings paper

Embargo date

9999-12-31