Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays
Publication:
Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays
Copy permalink
Date
2019
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ceyssens, Frederik
;
Welkenhuysen, Marleen
;
Puers, Bob
Journal
Journal of Micromechanics and Microengineering
Abstract
Description
Metrics
Views
1897
since deposited on 2021-10-27
Acq. date: 2026-01-10
Citations
Metrics
Views
1897
since deposited on 2021-10-27
Acq. date: 2026-01-10
Citations