Authors

Ceyssens, Frederik; Welkenhuysen, Marleen; Puers, Bob

ISSN

0960-1317

Issue

2

Journal

Journal of Micromechanics and Microengineering

Volume

29

Title

Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays

Publication type

Journal article