Publication:
Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch
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2053 since deposited on 2021-10-27
4last month
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Acq. date: 2026-05-17
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Statistics
Views
2053 since deposited on 2021-10-27
4last month
1last week
Acq. date: 2026-05-17
Citations