Publication:
Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch
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2092 since deposited on 2021-10-27
21last month
Acq. date: 2026-10-13
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Views
2092 since deposited on 2021-10-27
21last month
Acq. date: 2026-10-13
Citations