Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch

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Authors
Chan, BT; Boemmels, Juergen; Ryckaert, Julien; Zhang, Liping; Tao, Zheng; Altamirano Sanchez, Efrain; de Marneffe, Jean-Francois
Conference
45th Micro and Nano Engineering (MNE) Conference
Title
Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch
Publication type
Oral presentation
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