Publication:

Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Date

2019
Journal article
https://doi.org/10.1149/2.0181903jss
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33668.pdf 995.46 KB

Author(s)

Dhayalan, Sathish Kumar
;
Nuytten, Thomas  
;
Pourtois, Geoffrey  
;
Simoen, Eddy  
;
Pezzoli, Fabio
;
Bonera, Emiliano
;
Loo, Roger  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Shimura, Yosuke
;
Vandervorst, Wilfried  

Journal

ECS Journal of Solid State Science and Technology

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