Publication:

Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Date

2019
Journal article
https://doi.org/10.1149/2.0181903jss
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

33668.pdf 995.46 KB

Author(s)

Dhayalan, Sathish Kumar
;
Nuytten, Thomas  
;
Pourtois, Geoffrey  
;
Simoen, Eddy  
;
Pezzoli, Fabio
;
Bonera, Emiliano
;
Loo, Roger  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Shimura, Yosuke
;
Vandervorst, Wilfried  

Journal

ECS Journal of Solid State Science and Technology

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-27
Acq. date: 2026-10-09

Views

1938 since deposited on 2021-10-27
1last month
Acq. date: 2026-10-09

Citations

Statistics

Downloads

1 since deposited on 2021-10-27
Acq. date: 2026-10-09

Views

1938 since deposited on 2021-10-27
1last month
Acq. date: 2026-10-09

Citations