Epitaxial growth by MOCVD on 200 mm engineered substrates for power devices & ICs beyond 650 V

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Author(s)

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Wellekens, Dirk

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Magnani, Alessandro

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Amirifar, Nooshin

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Bakeroot, Benoit

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Odnoblyudov, Vladimir

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Groeseneken, Guido

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Decoutere, Stefaan

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Heuken, Michael

Metrics

2168 since deposited on 2021-10-27

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Acq. date: 2025-10-24