Authors

Hiblot, Gaspard; Liu, Yefan; Hellings, Geert; Van der Plas, Geert

Conference

2019 IEEE International Reliability Physics Symposium (IRPS)

Title

Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damage

Publication type

Proceedings paper

Embargo date

9999-12-31