Show simple item record

12-EUV layer Surrounding Gate Transistor (SGT) for vertical 6-T SRAM: 5-nm-class technology for ultra-density logic devices

dc.contributor.authorKim, Min-Soo
dc.contributor.authorHarada, N.
dc.contributor.authorKikuchi, Yoshiaki
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorMitard, Jerome
dc.contributor.authorHuynh Bao, Trong
dc.contributor.authorMatagne, Philippe
dc.contributor.authorTao, Zheng
dc.contributor.authorLi, Waikin
dc.contributor.authorDevriendt, Katia
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorLorant, Christophe
dc.contributor.authorSebaai, Farid
dc.contributor.authorPorret, Clément
dc.contributor.authorRosseel, Erik
dc.contributor.authorDangol, Anish
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorGeypen, Jef
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorPuliyalil, Harinarayanan
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorTeugels, Lieve
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorLi, Y.
dc.contributor.authorNakamura, H.
dc.contributor.authorMocuta, Dan
dc.contributor.authorMatsuoka, F.
dc.date.accessioned2021-10-27T11:29:59Z
dc.date.available2021-10-27T11:29:59Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33297
dc.sourceIIOimport
dc.title12-EUV layer Surrounding Gate Transistor (SGT) for vertical 6-T SRAM: 5-nm-class technology for ultra-density logic devices
dc.typeProceedings paper
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorKikuchi, Yoshiaki
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorLi, Waikin
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorDangol, Anish
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorPuliyalil, Harinarayanan
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecPuliyalil, Harinarayanan::0000-0002-9749-5307
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageT15-1
dc.source.conference2019 Symposium on VLSI Technology
dc.source.conferencedate9/06/2019
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8776532
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
45452.pdf
Size:
952.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record