Publication:

In-line metrology for characterization and control of extreme wafer thinning of bonded wafers

Date

2019

Journal article

Simple item page Full metadata Statistics

Files

39664.pdf 1.81 MB

Author(s)

Liebens, Maarten

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Vandeweyer, Tom

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Stoerring, Moritz

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Hiebert, Stephen

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Journal

IEEE Transactions on Semiconductor Manufacturing

Statistics

1920 since deposited on 2021-10-27

Acq. date: 2026-02-05