Publication:

In-line metrology for characterization and control of extreme wafer thinning of bonded wafers

Date

2019
Journal article
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Author(s)

Liebens, Maarten  
;
Jourdain, Anne  
;
De Vos, Joeri  
;
Vandeweyer, Tom  
;
Miller, Andy  
;
Beyne, Eric  
;
Li, Shifang
;
Bast, Gerard
;
Stoerring, Moritz
;
Hiebert, Stephen
;
Cross, Andrew  

Journal

IEEE Transactions on Semiconductor Manufacturing

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