Publication:

In-line metrology for characterization and control of extreme wafer thinning of bonded wafers

Date

2019
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

39664.pdf 1.81 MB

Author(s)

Liebens, Maarten  
;
Jourdain, Anne  
;
De Vos, Joeri  
;
Vandeweyer, Tom  
;
Miller, Andy  
;
Beyne, Eric  
;
Li, Shifang
;
Bast, Gerard
;
Stoerring, Moritz
;
Hiebert, Stephen
;
Cross, Andrew  

Journal

IEEE Transactions on Semiconductor Manufacturing

Abstract

Description

Statistics

Views

1929 since deposited on 2021-10-27
4last month
Acq. date: 2026-05-30

Citations

Statistics

Views

1929 since deposited on 2021-10-27
4last month
Acq. date: 2026-05-30

Citations