Authors

Luong, Vu; Philipsen, Vicky; Opsomer, Karl; Rip, Jens; Hendrickx, Eric; Heyns, Marc; Detavernier, Christophe; Laubis, Christian; Scholze, Frank

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

37

Title

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

Publication type

Journal article

Embargo date

9999-12-31