Authors

Margetis, Joe; Kohen, David; Porret, Clément; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Loo, Roger; Tolle, John

Conference

2nd Joint ISTDM / ICSI 2019 Conference

Title

Epitaxial growth of Ga doped SiGe for reduction of contact resistance in finFET source/drain materials

Publication type

Meeting abstract