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Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
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1976 since deposited on 2021-10-27
2last week
Acq. date: 2025-10-28
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Metrics
Views
1976 since deposited on 2021-10-27
2last week
Acq. date: 2025-10-28
Citations