Authors

De Smedt, Frank; Stevens, G.; De Gendt, Stefan; Cornelissen, Ingrid; Arnauts, Sophia; Meuris, Marc; Heyns, Marc; Vinckier, Chris

Issue

5

Journal

J. Electrochem. Soc.

Volume

146

Title

A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level

Publication type

Journal article