Publication:
Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants
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1894 since deposited on 2021-10-27
Acq. date: 2026-01-07
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1894 since deposited on 2021-10-27
Acq. date: 2026-01-07
Citations