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The growing applilcation field of laser debonding: from advanced packaging to future nanoelectronics
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Authors
Phommahaxay, Alain
;
Guerrero, Alice
;
Kennes, Koen
;
Podpod, Arnita
;
Brems, Steven
;
Slabbekoorn, John
;
Tussing, Sebastian
;
Spiess, Walter
;
Penger, Luke
;
Yess, Kim
;
Arnold, Kim
;
Rapps, Thomas
;
Lutter, Stefan
;
Sleeckx, Erik
;
Huyghebaert, Cedric
;
Asselberghs, Inge
;
Miller, Andy
;
Beyer, Gerald
;
Radu, Iuliana
;
Beyne, Eric
Conference
2019 International Wafer Level Packaging Conference (IWLPC)
Title
The growing applilcation field of laser debonding: from advanced packaging to future nanoelectronics
Publication type
Proceedings paper
Embargo date
9999-12-31
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