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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
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2011 since deposited on 2021-10-27
1last month
Acq. date: 2026-03-17
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Statistics
Views
2011 since deposited on 2021-10-27
1last month
Acq. date: 2026-03-17
Citations