Authors

Porret, Clément; Hikavyy, Andriy; Gomez Granados, Fernando; Baudot, Sylvain; Vohra, Anurag; Kunert, Bernardette; Douhard, Bastien; Bogdanowicz, Janusz; Schaekers, Marc; Kohen, David; Margetis, Joe; Tolle, John; Petersen Lima, Lucas; Sammak, Amir; Scappucci, Giordano; Rosseel, Erik; Langer, Robert; Loo, Roger

ISSN

2162-8769

Issue

8

Journal

ECS Journal of Solid State Science and Technology

Volume

8

Title

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

Publication type

Journal article