Authors

De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat

Conference

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Title

Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution

Publication type

Proceedings paper

Embargo date

9999-12-31