Authors

Ryckaert, Julien; Gupta, Anshul; Jourdain, Anne; Chava, Bharani; Van der Plas, Geert; Verkest, Diederik; Beyne, Eric

Conference

2019 Electron Devices Technology and Manufacturing Conference (EDTM)

Title

Extending the roadmap beyond 3nm through system scaling boosters: A case study on buried power rail and backside power delivery

Publication type

Proceedings paper

Embargo date

9999-12-31