Publication:
A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
2 since deposited on 2021-10-27
Acq. date: 2026-08-24
Views
2010 since deposited on 2021-10-27
3last month
1last week
Acq. date: 2026-08-25
Citations
Statistics
Downloads
2 since deposited on 2021-10-27
Acq. date: 2026-08-24
Views
2010 since deposited on 2021-10-27
3last month
1last week
Acq. date: 2026-08-25
Citations