Authors

Seema Saseendran, Sandeep; Kongnyuy, Tangla David; Figeys, Bruno; Marinins, Aleksandrs; Jansen, Roelof; Rottenberg, Xavier; Sabuncuoglu Tezcan, Deniz; Soussan, Philippe

Conference

Optical Fiber Communication Conference 2019

Title

A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation

Publication type

Proceedings paper

Embargo date

9999-12-31