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Accurate determination of Si sputter yield in the transient region
Publication:
Accurate determination of Si sputter yield in the transient region
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deleu, Jeroen
;
Brijs, Bert
;
Vandervorst, Wilfried
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Abstract
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1995
since deposited on 2021-10-06
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last week
Acq. date: 2026-04-06
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Statistics
Views
1995
since deposited on 2021-10-06
1
last month
1
last week
Acq. date: 2026-04-06
Citations