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Scaled TaN barriers for Cu interconnects: reliability performance
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Authors
Varela Pedreira, Olalla
;
Lesniewska, Alicja
;
Jourdan, Nicolas
;
Vega Gonzalez, Victor
;
Lariviere, Stephane
;
van der Veen, Marleen
;
Croes, Kristof
;
Tokei, Zsolt
Conference
IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
Title
Scaled TaN barriers for Cu interconnects: reliability performance
Publication type
Proceedings paper
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