3D TCAD model for poly-Si channel current and variability in vertical NAND flash memory

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Authors
Verreck, Devin; Arreghini, Antonio; Schanovsky, Franz; Stanojevic, Zlatan; Steiner, K.; Mitterbauer, F.; Karner, Markus; Van den Bosch, Geert; Furnemont, Arnaud
Conference
International Conference on Simulation of Semiconductor Processes and Devices - SISPAD
Title
3D TCAD model for poly-Si channel current and variability in vertical NAND flash memory
Publication type
Proceedings paper
Embargo date
9999-12-31
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