Integration of the 3MS low-k CVD material in a 0.18µm Cu single damascene process

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Authors
Gao, Teng; Gray, William; Van Hove, Marleen; Struyf, Herbert; Meynen, Herman; Vanhaelemeersch, Serge
Conference
Advanced Metallization Conference; September 28-30, 1999; Orlando, FL, USA.
Title
Integration of the 3MS low-k CVD material in a 0.18µm Cu single damascene process
Publication type
Oral presentation
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