Authors

Inoue, Fumihiro; Podpod, Arnita; Peng, Lan; Phommahaxay, Alain; Rebibis, Kenneth June; Uedono, Akira; Beyne, Eric

ISSN

1525-6125

Journal

Journal of Manufacturing Processes

Volume

58

Title

Morphological characterization and mechanical behavior by dicing and thinning on direct bonded Si wafer

Publication type

Journal article