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300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility
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Authors
Kljucar, Luka
;
Smets, Quentin
;
van Setten, Michiel
;
Mitard, Jerome
;
Belmonte, Attilio
;
Dekkers, Harold
;
Teugels, Lieve
;
Mao, Ming
;
Puliyalil, Harinarayanan
;
del Agua Borniquel, Jose Ignacio
;
Delhougne, Romain
;
Sankaran, Kiroubanand
;
Tokei, Zsolt
Conference
International Conference on Solid State Devices and Materials - SSDM
Title
300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility
Publication type
Proceedings paper
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