Publication:

300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Date

2020

Proceedings Paper

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Author(s)

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van Setten, Michiel

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Belmonte, Attilio

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Dekkers, Harold

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Puliyalil, Harinarayanan

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del Agua Borniquel, Jose Ignacio

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Delhougne, Romain

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Sankaran, Kiroubanand

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Statistics

2223 since deposited on 2021-10-28

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Acq. date: 2026-04-06