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Vertical III-V gate-all-around nanowire MOSFETs: Process integration and contact resistance study
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Authors
Ramesh, Siva
Supervisor
De Meyer, K.; Collaert, Nadine
Title
Vertical III-V gate-all-around nanowire MOSFETs: Process integration and contact resistance study
Publication type
PHD thesis
Embargo date
9999-12-31
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