Highly doped SiGe epitaxy in view of S/D applications

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Authors
Rengo, Gianluca; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Nakazaki, Nobuya; Pourtois, Geoffrey; Vantomme, Andre; Loo, Roger
Conference
ECS2020 Fall Meeting: SiGe, Ge & Related Compounds: Materials, Processing and Devices
Title
Highly doped SiGe epitaxy in view of S/D applications
Publication type
Meeting abstract
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