Publication:

Highly doped SiGe epitaxy in view of S/D applications

Date

2020-07

Meeting abstract

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Author(s)

Rengo, Gianluca

;

Porret, Clément

;

Hikavyy, Andriy

;

;

Nakazaki, Nobuya

;

Pourtois, Geoffrey

;

Vantomme, Andre

;

Statistics

2023 since deposited on 2021-10-29

2last month

Acq. date: 2026-04-05