Optimization of wafer-level low-impedance contact CDM testers

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Authors
Simicic, Marko; Wu, Wei-Min; Jack, Nathan; Tamura, Shinichi; Shimada, Yohei; Sawada, Masanori; Chen, Shih-Hung
Conference
EOS/ESD Symposium
Title
Optimization of wafer-level low-impedance contact CDM testers
Publication type
Proceedings paper
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