Authors

Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Van Daele, Michiel; Solano, Eduardo; Vos, Rita; Dendooven, Jolien; Detavernier, Christophe

DOI

10.1039/d0cp00395f

ISSN

1463-9076

Issue

17

Journal

Physical Chemistry Chemical Physics

Volume

22

Title

Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Publication type

Journal article