Browsing by author "Levrau, Elisabeth"
Now showing items 1-9 of 9
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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, K; Dendooven, Jolien; Verdonck, Patrick; Baklanov, Mikhaïl; Detavernier, Christoph (2013) -
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, Kilain; Dendooven, Jolien; Ludwig, Karl; Verdonck, Patrick; Meersschaut, Johan; Baklanov, Mikhaïl; Detavernier, Christophe (2013) -
In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry
Dendooven, Jolien; Devloo-Casier, Kilian; Levrau, Elisabeth; Van Hove, Robbert; Pulinthanathu Sree, Sreeprasanth; Baklanov, Mikhaïl; Martens, Johan; Detavernier, Christophe (2012) -
Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN
Sun, Yiting; Levrau, Elisabeth; Blauw, Michiel; Meersschaut, Johan; Verdonck, Patrick; Struyf, Herbert; Detavernier, Chrostophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2013) -
Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Van Daele, Michiel; Solano, Eduardo; Vos, Rita; Dendooven, Jolien; Detavernier, Christophe (2020) -
Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Baklanov, Mikhaïl; Detavernier, Christophe; De Feyter, Steven; Armini, Silvia (2014) -
Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films
Sun, Yiting; Levrau, Elisabeth; Zhang, Liping; Geypen, Jef; Meersschaut, Johan; Franquet, Alexis; Le, Quoc Toan; de Marneffe, Jean-Francois; Bender, Hugo; Struyf, Herbert; Detavernier, Christophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2015) -
Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium
Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Solano Minuesa, Eduardo; Van de Kerckhove, Kevin; Devloo-Casier, Kilian; Pulinthanathu Sree, Sreeprasant; Martens, Johan A.; Vos, Rita; Jans, Karolien; Dendooven, Jolien; Vereecken, Philippe; Stakenborg, Tim; Detavernier, Christophe (2019) -
Tuning the pore size of ink-bottle mesopores by atomic layer deposition
Dendooven, Jolien; Goris, Bart; Devloo-Casier, Kilian; Levrau, Elisabeth; Biermans, Ellen; Baklanov, Mikhaïl; Ludwig, Karl; Van Der Voort, Pascal; Bals, Sara; Detavernier, Christophe (2012)