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Gate-All-Around nanosheet field-effect transistors for advanced logic and memory applications: integration and device features
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Gate-All-Around nanosheet field-effect transistors for advanced logic and memory applications: integration and device features
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Date
2020
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Veloso, Anabela
;
Matagne, Philippe
;
Eneman, Geert
;
Mertens, Hans
;
Vaisman Chasin, Adrian
;
Simoen, Eddy
;
Horiguchi, Naoto
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1949
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Acq. date: 2026-02-24
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Statistics
Views
1949
since deposited on 2021-10-29
2
last month
1
last week
Acq. date: 2026-02-24
Citations