Separation of electron and hole trapping components of PBTI in SiON nMOS transistors

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Authors

Waltl, Michael; Stampfer, Bernhard; Rzepa, Gerhard; Kaczer, Ben; Grasser, Tibor

ISSN

0026-2714

Journal

Microelectronics Reliability

Volume

114

Title

Separation of electron and hole trapping components of PBTI in SiON nMOS transistors

Publication type

Journal article

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