Authors

Maex, Karen; Palmans, Roger; Lantasov, Yuri; Brongersma, Sywert; Richard, Emmanuel; Vervoort, Iwan

Conference

196th Meeting of the Electrochemical Society: 3rd Int. Symposium on Electrochemical Technology Applications in Electronics

Title

Integration of electroless and electrolytic Cu in the IC back end line of technologies

Publication type

Meeting abstract

Embargo date

9999-12-31