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Root cause analysis of gate shorts in semi-vertical GaN MOSFET devices
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Authors
Diehle, Patrick
;
Hübner, Susanne
;
De Santi, Carlo
;
Mukherjee, Kalparupa
;
Zanoni, Enrico
;
Meneghini, Matteo
;
Geens, Karen
;
You, Shuzhen
;
Decoutere, Stefaan
;
Altmann, Frank
Conference
International Conference on Advanced Semi-conductor Devices And Microsystems
Title
Root cause analysis of gate shorts in semi-vertical GaN MOSFET devices
Publication type
Proceedings paper
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