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Surface cleaning issues in thin-oxide technology
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Authors
Mertens, Paul
;
Bearda, Twan
;
Houssa, Michel
;
Loewenstein, Lee
;
Teerlinck, Ivo
;
De Gendt, Stefan
;
Vos, Rita
;
Kenis, Karine
;
Naili, Mohamed
;
Heyns, Marc
Conference
30th IEEE Semiconductor Interface Specialists' Conference
Title
Surface cleaning issues in thin-oxide technology
Publication type
Oral presentation
Embargo date
9999-12-31
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