Authors

Joshi, Abhijeet; Rengo, Gianluca; Porret, Clément; Lin, Kun-Lin; Chang, C-H.; Basol, Bulent

Conference

Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 11

Title

Characterization of annealing and dopant activation processes using Differential Hall Effect Metrology (DHEM)

Publication type

Proceedings paper