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Publication:

Forksheet FETs for Advanced CMOS Scaling: Forksheet-Nanosheet Co-Integration and Dual Work Function Metal Gates at 17nm N-P Space

Date

2021
Proceedings Paper
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Author(s)

Mertens, Hans  
;
Ritzenthaler, Romain  
;
Oniki, Yusuke  
;
Briggs, Basoene  
;
Chan, BT  
;
Hikavyy, Andriy  
;
Hopf, Toby  
;
Mannaert, Geert  
;
Tao, Zheng  
;
Sebaai, Farid  
;
Peter, Antony  
;
Vandersmissen, Kevin  
;
Dupuy, Emmanuel  
;
Rosseel, Erik  
;
Batuk, Dmitry  
;
Geypen, Jef  
;
Martinez Alanis, Gerardo Tadeo  
;
Abigail, Daniel_
;
Grieten, Eva  
;
D'have, Koen  
;
Mitard, Jerome  
;
Subramanian, Sujith  
;
Ragnarsson, Lars-Ake  
;
Weckx, Pieter  
;
Chehab, Bilal  
;
Hellings, Geert  
;
Ryckaert, Julien  
;
Dentoni Litta, Eugenio  
;
Horiguchi, Naoto  

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2241 since deposited on 2021-10-31
Acq. date: 2025-10-27

Citations

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2241 since deposited on 2021-10-31
Acq. date: 2025-10-27

Citations

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