Publication:
Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties
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1975 since deposited on 2021-10-31
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Acq. date: 2026-09-13
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Statistics
Views
1975 since deposited on 2021-10-31
1last month
Acq. date: 2026-09-13
Citations