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Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties
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Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties
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Date
2021
Meeting abstract
https://doi.org/10.1149/MA2021-01341096mtgabs
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Porret, Clément
;
Rengo, Gianluca
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Ayyad, Mustafa
;
Morris, Richard
;
Vantomme, Andre
;
Loo, Roger
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1965
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Acq. date: 2025-12-16
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Views
1965
since deposited on 2021-10-31
2
last month
1
last week
Acq. date: 2025-12-16
Citations