Authors
Keulemans, Grim;
Liang, Boshen;
Podkovskiy, Alexey;
Jambaldinni, Shruti;
Wysocka, Dominika;
Zhang, Lei;
Stakenborg, Tim;
Cheyns, David;
Heremans, Paul;
Rochus, Veronique
EISBN
978-1-6654-1373-2
ISSN
None
Conference
22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Journal
2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Title
Transient pull-in simulation of electrostatic microvalve with physics-based contact function
Publication type
Proceedings paper