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Transient pull-in simulation of electrostatic microvalve with physics-based contact function
dc.contributor.author | Keulemans, Grim | |
dc.contributor.author | Liang, Boshen | |
dc.contributor.author | Podkovskiy, Alexey | |
dc.contributor.author | Jambaldinni, Shruti | |
dc.contributor.author | Wysocka, Dominika | |
dc.contributor.author | Zhang, Lei | |
dc.contributor.author | Stakenborg, Tim | |
dc.contributor.author | Cheyns, David | |
dc.contributor.author | Heremans, Paul | |
dc.contributor.author | Rochus, Veronique | |
dc.date.accessioned | 2021-11-02T15:55:10Z | |
dc.date.available | 2021-11-02T15:55:10Z | |
dc.date.issued | 2021 | |
dc.identifier.other | WOS:000706452600017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37435 | |
dc.source | WOS | |
dc.title | Transient pull-in simulation of electrostatic microvalve with physics-based contact function | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Keulemans, Grim | |
dc.contributor.imecauthor | Liang, Boshen | |
dc.contributor.imecauthor | Podkovskiy, Alexey | |
dc.contributor.imecauthor | Jambaldinni, Shruti | |
dc.contributor.imecauthor | Wysocka, Dominika | |
dc.contributor.imecauthor | Zhang, Lei | |
dc.contributor.imecauthor | Stakenborg, Tim | |
dc.contributor.imecauthor | Cheyns, David | |
dc.contributor.imecauthor | Heremans, Paul | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.orcidimec | Keulemans, Grim::0000-0001-6896-7275 | |
dc.contributor.orcidimec | Liang, Boshen::0000-0003-3299-9034 | |
dc.contributor.orcidimec | Stakenborg, Tim::0000-0001-9878-9078 | |
dc.contributor.orcidimec | Cheyns, David::0000-0002-1327-8752 | |
dc.contributor.orcidimec | Heremans, Paul::0000-0003-2151-1718 | |
dc.identifier.doi | 10.1109/EuroSimE52062.2021.9410843 | |
dc.identifier.eisbn | 978-1-6654-1373-2 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.conference | 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) | |
dc.source.conferencedate | APR 19-22, 2021 | |
imec.availability | Under review |
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