Publication:
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
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149 since deposited on 2021-11-02
11last month
7last week
Acq. date: 2026-07-21
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1718 since deposited on 2021-11-02
3last month
2last week
Acq. date: 2026-07-21
Citations