Publication:
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
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Acq. date: 2026-06-06
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138 since deposited on 2021-11-02
3last month
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1715 since deposited on 2021-11-02
1last month
Acq. date: 2026-06-06
Citations